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COMPANY
INFORMATION
BUSINESS
EQUIPMENT
PART
All
Heater
Valve / Pump
PCB
Module
Quartz / Ceramic
Novellus / TEL
Magnet
Robot
Etc
REPAIR
CONTACT US
INQUIRY
Q&A
NEWS
Ebay
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715-027638-014 REV-B. CHAMBER, TOP PC
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715-028306-001 WASHER 1/4 TURN
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715-028405-001 HOUSING REACTION CHAMBER
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715-028459-001 LOWER SEAL PLATE
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715-028552-001 UPPER ELECTRODE RING CLAMP
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715-028552-001 REV-A. UPPER ELECTRODE RING CLAMP
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715-028554-002 PLATE UPPER SEAL 8 inches ELECTRODE
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715-028606-162 REV-B. PLATE WC 6 inches
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715-030136-003 ESC HOT EDGE RING
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715-030136-004 REV-C. ESC EDGE RING 6 inches
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715-030329-002 POLY CHAMBER LINER
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715-030329-002 REV-B. POLY CHAMBER LINER
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715-030329-002 REV-C. POLY CHAMBER LINER
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715-030860-001 REV-B. LINER SPACER, EXT GND RING, 2.0CM
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715-031507-001 HOUSING LOWER REACTION CHAMBER
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715-031507-002 HOUSING LOWER REACTION CHAMBER
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