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COMPANY
INFORMATION
BUSINESS
EQUIPMENT
PART
All
Heater
Valve / Pump
PCB
Module
Quartz / Ceramic
Novellus / TEL
Magnet
Robot
Etc
REPAIR
CONTACT US
INQUIRY
Q&A
NEWS
Ebay
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PART
innofish
2025-10-30T15:19:46+09:00
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All : 5212
0100-35083 CHAMBER INTERCONNECT B-D CENTURA MXP
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0100-35082 CHAMBER INTERCONNECT A-C CENTURA MXP
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0100-35066 CHAMBER PNEUMATIC INTERCONNECT
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0100-35065 PCB ASSY, SERIAL ISOLATOR
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0100-35059 ASSY PCB REMOTE DIST
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0100-35058 ASSY PCB, LOADLOCK INTERLOCKS
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0100-35054 PCB ASSY, CHAMBER INTERFACE
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0100-35053 PCB ASSY, MAINFRAME INTERLOCKS
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0100-35049 ASSEMBLY PCB SYS RESET / INTLK SEL BD
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0100-35034 PCB ASSY, STEPPER DRIVER POWER DISTRIBUTION
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0100-20371 INTERLOCK STATUS PCB (5/21)
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0100-20318 TC ISO AMP BD
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0100-20313 CHAMBER INTERCONNECT BD
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0100-20312 DC BIAS INTERFACE BOARD
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0100-20311 VAC RELAY INTLK BOARD (9/10)
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0100-20253 SMOKE WATER LEAK DETECT CONF BOARD
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