-
0050-25994 MANIFOLD WATER SOURCE 13" SST
-
0041-00830 0041-00832 12" RF COIL HEATER ULTIMA (HDP-CVD)
-
0040-76226 EXHAUST DUCT, OZONATOR
-
0040-75904 0040-20146 BELLOWS WAFER ORIENTER
-
0040-75903 0020-21681 SUPPORT CHUCK
-
0040-75435 PANEL, H2O MANIFOLD O3 DELIVERY/MONITOR
-
0040-75434 BRACKET, FRONT INTERLOCK SWITCH
-
0040-70096 FLANGE VCR ORIENTER
-
0040-48365 TOP COIL 8" ULTIMA (HDP-CVD)
-
0040-47488 0040-04987 8" RF COIL HEATER ULTIMA (HDP-CVD)
-
0040-42077 GND SHIELD HEATER 12" ULTIMA (HDP-CVD)
-
0040-41964 TOP COIL 12" ULTIMA (HDP-CVD)
-
0040-39554 GIMBAL ASSY, ORIENTER LIFTER ASSY
-
0040-37492 WELD, FRAME, O3 DELIVERY WITH INLINE MONITOR
-
0010-76693 MAGNET ASSEMBLY G-3 ENCAPSULATED
-
0010-33890 MAGNET ASSEMBLY G-3 ENCAPSULATED